Lasers in thousands of the world's wafer steppers and scanners use our
state-of-the-art lithography gases and gas mixtures.
Our customers include all of the major global laser, stepper, and scanner
manufacturers as well as many of the world's largest semiconductor manufacturers.
They know they can rely on the highest quality laser gases coupled with in-depth
knowledge of critical gas technologies.
Our customers also benefit from the development of new technologies and innovations
driven by our Centers of Excellence such as the one for lithography gases in Alpha,
New Jersey. Key areas of expertise include:
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Full spectrum - We lead the market for the manufacture and purification of all raw materials necessary for photolithography.
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Cylinder expertise - We have special expertise, which is based on our proprietary technologies for the handling and treatment of cylinders containing both inert and halogen (F2) gases.
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Mixing capabilities - We have pioneered highly specific mixing technologies to create multi-component mixtures that are completely homogeneous.
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Analytical technologies - We have developed proprietary analytical technologies that surpass industry norms; all SPECTRA lithography cylinders are provided with a Certificate of Analysis.
Rare gas and halogen gas mixtures for excimer lasers
Linde fully supports the gas mixtures required for the entire spectrum of excimer lasers used in electronics manufacturing.
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XeCl at 308 nm
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KrF at 248 nm
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ArF at 193 nm