to support high precision laser applications for eye surgery and semiconductor manufacturing, Xenon to propel satellites through space and the most exotic VOC calibration gas mixtures for highly sensitive environmental measurement and pollution control. Precision matters in everything we do.

SPECTRA Lithography Gases Specialty gas mixtures and high purity rare gases for the most advanced semiconductor manufacturing applications.

SPECTRA Excimer Laser Gases Precision engineered gas mixtures with Neon, Fluorine and other components for a range of Excimer lasers. Used in a diverse range of applications including delicate eye surgery for vision correction and high tech labeling, etching and marking. SPECTRA Dark Matter Xenon Ultra high purity Xenon with a specification designed for Gamma-ray and X-ray spectroscopy detectors. These are used in instrumentation that is used to conduct research into the most fundamental basics of the universe in which we live and the world around us and more down to earth applications such as medical diagnostics.

SPECTRA Propulsion Xenon Highly purified Xenon for use in space satellite ion thrusters.

SPECTRA CT Scan Xenon Ultra high purity medical grade Xenon is for use in CT scanners and other diagnostics applications.

SPECTRA MRI Isotopes Including the stable isotopes of 3He and 129Xe for specialist Magnetic Resonance Imaging applications in high technology medical diagnosis.

SPECTRA Isotopic Gases Our unique sourcing, enrichment and processing capabilities and capability for further chemical synthesis allows Linde to offer the most unique range of stable gaseous isotopic components. Stable isotopic molecules include a range with deuterium replacing regular hydrogen, such as deuterated ammonia, deuterated methane and deuterium chloride. Another range uses 18O to replace regular oxygen in carbon monoxide and carbon dioxide. We also offer helium-3, a rare isotope of regular helium. Applications for these isotopes are extremely diverse ranging from scientific and medical research to biotechnology, pharmaceutical drug discovery and production of electronics devices for consumer products and the latest digital applications.

SPECTRA Protocol Gases Advanced environmental calibration gas mixtures for criteria pollutants that are produced in accordance with, and for use in applications that comply with various environmental requirements, such as the US EPA protocol. SPECTRA Protocol Gases include all compounds and ranges that are listed in the US EPA Protocol. In addition, SPECTRA Protocol Gases include, standards for mercury, ammonia, hydrogen chloride, nitrous oxide and formaldehyde. Precision matters in everything we do.

SPECTRA VOC Standards Volatile Organic Compounds can be some of the most difficult environmental pollutants to measure and identify. VOC's can represent environmental and health hazards at very low levels down to parts per billion. SPECTRA VOC Standards are calibration gas mixtures that are engineered, produced and certified to meet the most sophisticated environmental measurement protocols: TO 14A, 15 and 17. SPECTRA VOC standards have included up to 109 components in a single cylinder, and other standards with concentrations of each component at the single digit ppb levels. SPECTRA - world class innovation and technology that our customers have come to expect from The Linde Group.

SPECTRA R-20 Rare gases are exactly as described: rare. This means that anything that can be done to recover and re-use them should be done. This ensures cost effective and sustainable operation for the long term. With this in mind, Linde has innovated and engineered a wide range of rare gas recovery equipment including the SPECTRA R-20. With rare gas molecules being some of the most valuable molecules on the planet, capture and recycling is a highly cost effective solution and is getting increasing usage in many applications including the energy-efficient-lighting industry.

• Full spectrum - We lead the market for the manufacture and purification of all raw materials necessary for photolithography. 

• Cylinder expertise - We have special expertise, which is based on our proprietary technologies for the handling and treatment of cylinders containing both inert and halogen (F₂) gases.
  

• Mixing capabilities - We have pioneered highly specific mixing technologies to create multi-component mixtures that are completely homogeneous. 

• Analytical technologies - We have developed proprietary analytical technologies that surpass industry norms; all SPECTRA lithography cylinders are provided with a Certificate of Analysis.

Rare gas and halogen gas mixtures for excimer lasers

Linde fully supports the gas mixtures required for the entire spectrum of excimer lasers used in electronics manufacturing.

• XeCl at 308 nm

• KrF at 248 nm

• ArF at 193 nm

Extreme ultra-violet (EUV) lithography is the next-generation technology that allows the leading-edge semiconductor designs to continue advancing. Large amounts of hydrogen are required to continuously clean the commercial light sources, which use liquid tin as a lasing medium. Linde provides a full portfolio of bulk and on-site H₂ solutions for its customers growing requirements.